11‐5: First Plane Source Evaporator for 100x100mm OLED

11‐5: First Plane Source Evaporator for 100x100mm OLED

The plane source evaporator has been developed for the 100x100mm glass substrate for the first time. The shadow distance formed by an angle of incidence and the FMM thickness has been measured and the doped depth profile of green and blue EML layers have been observed in the plane source evaporation...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2021-05, Vol.52 (1), p.139-142
Hauptverfasser: Hwang, Changhun, Kim, Sung Su, Jeong, Inho, Chin, Byung Doo
Format: Artikel
Sprache:eng
Schlagworte:
Evaporation
Evaporators
FMM
Glass substrates
Incidence angle
Plane Source Evaporator
Shadow Distance
Shadows
Thickness measurement
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Beschreibung
Zusammenfassung:The plane source evaporator has been developed for the 100x100mm glass substrate for the first time. The shadow distance formed by an angle of incidence and the FMM thickness has been measured and the doped depth profile of green and blue EML layers have been observed in the plane source evaporation. The submicron scale shadow distances were as 0.2~0.76um and the doping profiles appears quite uniform. Therefore, it is promising for very high ppi OLED and high brightness OLED to develop by the plane source evaporation techniques.
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.14630