59‐6: Directed Electrostatic Microassembly for MicroLED Display

We are developing a new chip integration tool based on massively parallel deterministic sorting and assembly, aiming to achieve the low cost of printing with the control of pick and place. Such a tool would enable scalable microLED display manufacturing and heterogeneous integration for advanced fun...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2021-05, Vol.52 (1), p.845-848
Hauptverfasser: Rupp, Bradley B., Crawford, Lara S., Lu, Jeng Ping, Plochowietz, Anne, Biegelsen, Dave, Raychaudhuri, Sourobh, Butylkov, Sergey, Wang, Yunda, Chow, Eugene M.
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Sprache:eng
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Zusammenfassung:We are developing a new chip integration tool based on massively parallel deterministic sorting and assembly, aiming to achieve the low cost of printing with the control of pick and place. Such a tool would enable scalable microLED display manufacturing and heterogeneous integration for advanced functionality. We describe a prototype system demonstrating continuous line by line assembly, and report single chip speed measurements of a centimeter per second, suggesting the approach could eventually support high throughput.
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.14815