59‐6: Directed Electrostatic Microassembly for MicroLED Display
We are developing a new chip integration tool based on massively parallel deterministic sorting and assembly, aiming to achieve the low cost of printing with the control of pick and place. Such a tool would enable scalable microLED display manufacturing and heterogeneous integration for advanced fun...
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Veröffentlicht in: | SID International Symposium Digest of technical papers 2021-05, Vol.52 (1), p.845-848 |
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Hauptverfasser: | , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We are developing a new chip integration tool based on massively parallel deterministic sorting and assembly, aiming to achieve the low cost of printing with the control of pick and place. Such a tool would enable scalable microLED display manufacturing and heterogeneous integration for advanced functionality. We describe a prototype system demonstrating continuous line by line assembly, and report single chip speed measurements of a centimeter per second, suggesting the approach could eventually support high throughput. |
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ISSN: | 0097-966X 2168-0159 |
DOI: | 10.1002/sdtp.14815 |