33‐6: Roll‐To‐Plate Nano‐Imprint Lithography for High‐Volume Production of AR Glasses: Equipment, Materials, and Processes

Today, the prevailing AR‐glasses displays are using waveguides. The light in‐ & outcoupling structures that these glasses contain can be made by UV nanoimprint lithography. Nanoimprint lithography tools have typical cycle times of around 40 imprints per hour, roughly resulting in 8M eyepieces pe...

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Veröffentlicht in:	SID International Symposium Digest of technical papers 2021-05, Vol.52 (1), p.447-449
Hauptverfasser:	Meulen, Jan Matthijs Ter, (Pim) Veldhuizen, L.W., (Sander) Kommeren, A.S., Willems, Ard A. G., Dielen, Marc, Driessen, Elisa, Neelen, Rob A.W., Ercan, Erhan, Tam, Kar Kit Gary, Titulaer, Bram J.F.
Format:	Artikel
Sprache:	eng
Schlagworte:	(very) large area manufacturing Augmented reality Eyepieces nano-imprint Lithography Nanolithography Waveguides
Online-Zugang:	Volltext
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