33‐6: Roll‐To‐Plate Nano‐Imprint Lithography for High‐Volume Production of AR Glasses: Equipment, Materials, and Processes

Today, the prevailing AR‐glasses displays are using waveguides. The light in‐ & outcoupling structures that these glasses contain can be made by UV nanoimprint lithography. Nanoimprint lithography tools have typical cycle times of around 40 imprints per hour, roughly resulting in 8M eyepieces pe...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2021-05, Vol.52 (1), p.447-449
Hauptverfasser: Meulen, Jan Matthijs Ter, (Pim) Veldhuizen, L.W., (Sander) Kommeren, A.S., Willems, Ard A. G., Dielen, Marc, Driessen, Elisa, Neelen, Rob A.W., Ercan, Erhan, Tam, Kar Kit Gary, Titulaer, Bram J.F.
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Sprache:eng
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Zusammenfassung:Today, the prevailing AR‐glasses displays are using waveguides. The light in‐ & outcoupling structures that these glasses contain can be made by UV nanoimprint lithography. Nanoimprint lithography tools have typical cycle times of around 40 imprints per hour, roughly resulting in 8M eyepieces per year made on 300mm wafers. To serve the projected mass market adoption, hundreds of imprint tools will be needed. An important question is how the eyepieces can be made more efficiently and cost‐effectively. The Morphotonics' Roll‐to‐Plate imprint technology enables high volume production, having the opportunity for large‐area imprinting, manufacturing multiple products in a single imprint step.
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.14713