Creation of Localized Ensembles of NV Centers in a Diamond Grown in a Microwave CVD Reactor and Study of Their Properties

This paper summarizes the results of studying the creation of localized ensembles of NV centers in a single-crystal diamond. The diamond was doped with nitrogen during its CVD growth. Due to the use of a microwave CVD reactor, in which a rapid (a few seconds) change in the composition of the gas mixture is realized, thin (nanometer thick) doped diamond layers were obtained, the position of which relative to the substrate surface is known with high accuracy. The possibility of forming a matrix of NV centers localized on the crystal surface is demonstrated. The results of studying the fluorescence of NV centers in such structures are presented.