Development of a source of accelerated neutral particles for the final purification of dielectric substrates

The paper discusses approaches to the improvement of sources for receiving streams of accelerated neutral particles, applied for final purification of dielectric surfaces. It is revealed that the most effective method of neutralization is based on the reflection of ions from a solid surface with their subsequent recharge. In the present work novel approach to the design of an accelerated neutral particles generator and the results of the study of its main characteristics are shown. Also a consistent cleaning process of a borosilicate glass using a developed source is demonstrated.