Highly Responsive Metal Oxide (V2O5)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring

The letter reports highly sensitive metal oxide (V 2 O 5 ) based NanoElectromechanical Systems (NEMS) Pirani gauge for pressure monitoring of a packaged device. The absence of additional supplementary material in the sensing element increases the sensing area and enables the in-situ monitoring capability. Considering the feasibility of the idea, the design is simulated and verified with the experimental results of the fabricated device. The device shows a sensitivity of 5.76 % per decade-Pa in the working range from 4 Pa to 2.7\times 10^{3} Pa. The maximum average temperature of the sensing element is 48 °C at 4 Pa. It ensures corrosion-free operation and increases the lifetime of the device. The computed thermal response time of the device is ~500 ms at a power consumption of 285\mu \text{W} . [2020-0335]