On the Choice of a Strategy for Broadband Optical Monitoring of the Deposition of Multilayer Coatings

The correlation of errors for various broadband optical monitoring strategies for controlling deposition of multilayer coatings, including strategies with replaceable monitoring chips, is investigated. It is shown that it is necessary to take into account the effect of error self-compensation when choosing a monitoring strategy. The results of this study can be used to select the most promising monitoring strategy for a given type of multilayer coatings.