Micromachined High Frequency 1-3 Piezocomposite Transducer Using Picosecond Laser

In this article, a PZT/Epoxy 1-3 piezoelectric composite based on picosecond laser etching technology is developed for the fabrication of high-frequency ultrasonic transducer. The design, fabrication, theoretical analysis, and performance of the piezocomposite and transducer are presented and discussed. According to the test results, the area of the PZT pillar is 20.5\mu \text{m}\,\,\times 20.5\,\,\mu \text{m} , the average width of the kerf is 4.5~\mu \text{m} , and the thickness of the piezocomposite is 38~\mu \text{m} . The fabricated 1-3 piezocomposite has a resonant frequency of 46.5 MHz, a parallel resonant frequency of 65 MHz, and an electromechanical coupling coefficient of 0.73. According to the wires phantom imaging, its imaging resolution can reach 50~\mu \text{m} . This study shows that the proposed picosecond laser micromachining technique can be applied in the fabrication of high frequency 1-3 piezocomposite and transducer.