Piezoelectric P(VDF-TrFE) film inkjet printed on silicon for high-frequency ultrasound applications

We investigated the innovative processing of poly(vinylidene fluoride-trifluoroethylene) P(VDFx-TrFE1-x) (x = 83 mol. %) by inkjet printing to deliver uniform and thickness-controlled layers on silicon substrates. Here, we provide detailed processing steps and optimize film deposition conditions. Th...

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Veröffentlicht in:Journal of applied physics 2021-05, Vol.129 (19), Article 195107
Hauptverfasser: Banquart, Aline, Callé, Samuel, Levassort, Franck, Fritsch, Lionel, Ossant, Frédéric, Toffessi Siewe, Sean, Chevalliot, Stéphanie, Capri, Arnaud, Grégoire, Jean-Marc
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Sprache:eng
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Zusammenfassung:We investigated the innovative processing of poly(vinylidene fluoride-trifluoroethylene) P(VDFx-TrFE1-x) (x = 83 mol. %) by inkjet printing to deliver uniform and thickness-controlled layers on silicon substrates. Here, we provide detailed processing steps and optimize film deposition conditions. The thickness coupling factor for a P(VDF-TrFE) film around 11 μm thick was 22%, demonstrating good electromechanical performance after poling. These multilayer structures were specifically for high-frequency, single-element ultrasonic transducer applications. The measurements of electro-acoustic responses were in water. The maximal frequency was centered at 33.2 MHz and had a fine axial resolution at 22 μm, corresponding to a fractional bandwidth at −6 dB of 100%. In the context of technological evolutions aimed at miniaturized devices and integrated electronics, these results allow for the consideration of complex structures such as multi-element transducers for high-frequency imaging applications.
ISSN:0021-8979
1089-7550
DOI:10.1063/5.0048444