Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires

We report on the extended infrared single-photon response of niobium nitride superconducting nanowires deposited by atomic layer deposition. The superconducting nanowire single-photon detectors are based on 4.65 nm thick NbN, patterned into 100 nm meanders, and characterized at 2.5 K. We verify sing...

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Veröffentlicht in:Applied physics letters 2021-05, Vol.118 (19)
Hauptverfasser: Taylor, Gregor G., Morozov, Dmitry V., Lennon, Ciaran T., Barry, Peter S., Sheagren, Calder, Hadfield, Robert H.
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Sprache:eng
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Zusammenfassung:We report on the extended infrared single-photon response of niobium nitride superconducting nanowires deposited by atomic layer deposition. The superconducting nanowire single-photon detectors are based on 4.65 nm thick NbN, patterned into 100 nm meanders, and characterized at 2.5 K. We verify single-photon sensitivity from 1310 to 2006 nm with saturated response at shorter wavelengths.
ISSN:0003-6951
1077-3118
DOI:10.1063/5.0048799