Simulation by COMSOL of Effects of Probe on Inductively Coupled Argon Plasma

A new system is simulated to find the effects of the presence of any impurities or different devices, such as different probes along the plasma path in the torque, on plasma parameters such as electron density, electric potential, pressure, and temperature. A torque with two coils of equal size and a probe between them is simulated by the inductively coupled plasma (ICP) module in the COMSOL simulation program. Two modes are considered in the tunnel, the most important is the presence and absence of probe between the two coils. The results and measurements are compared and presented as figures and diagrams. The main outcomes reveal that the presence of any probe, even with the slightest penetration of the plasma edge, can affect the properties of the plasma. Software simulation is one of the fastest ways to get results at the least cost. In more advanced work in the future, it is possible to investigate the existence of several probes of different sizes as well as the effect of temperature fluctuations on the plasma.