InP nanowires on Si(111) for piezotronic applications

III-V nanowires (NWs) are a promising technology for piezotronic and nanooptoelctronic applications. In this work, we investigate the processes of fabricating a structure with InP NW arrays on a silicon substrate for piezotronic applications. The coating of the NW array with a polymer and the fabrication of a transparent electrical contact to NWs is studied. The piezoelectric effect for the structures with a nonzero piezoelectric modulus d 33 is demonstrated in an oil environment at voltage amplitudes of about 100 mV. The experimental electromechanical coupling is about 0.049, which is close to the theoretical estimate of 0.053.