OMT-Coupled CMB Detector Development at Argonne

Future cosmic microwave background (CMB) experiments will deploy increasing numbers of superconducting detectors with requirements for increased sensitivity and reduced systematics. We report on the ongoing development of OMT-coupled CMB detectors at Argonne National Laboratory. Key areas of development include bolometers with dual Transition Edge Sensors (TES) for easier lab characterization, a hybrid SiN membrane fabrication process, a chemical vapor deposition (CVD) SiN dielectric process, and a new pixel design for improved compatibility with large scale fabrication. These developments enhance our ability to fabricate large-scale (150 mm diameter wafers) detector arrays with the performance necessary for future CMB experiments.