Study of partial pressures of gases in vacuum chamber using multifunctional high-vacuum plant

Study of partial pressures of gases in vacuum chamber using multifunctional high-vacuum plant

The article studies the mass spectrum of gases inside the vacuum chamber of a multifunctional high-vacuum plant during pumping by different types of high-vacuum pumps. The most effective method to provide the high vacuum inside the cryovacuum systems is to jointly use turbomolecular and cryoadsorpti...

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Veröffentlicht in:Journal of physics. Conference series 2021-02, Vol.1799 (1), p.12035
Hauptverfasser: Sokolov, A N, Rozanov, L N, Schedrincky, M Z, Bebyakov, V M, Vorobev, M G, Sinkova, V A, Sukharev, K N
Format: Artikel
Sprache:eng
Schlagworte:
High vacuum
Physics
System effectiveness
Vacuum chambers
Vacuum pumps
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Zusammenfassung:The article studies the mass spectrum of gases inside the vacuum chamber of a multifunctional high-vacuum plant during pumping by different types of high-vacuum pumps. The most effective method to provide the high vacuum inside the cryovacuum systems is to jointly use turbomolecular and cryoadsorption pumps with the ion pump operating periodically.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1799/1/012035