Study on the characteristics of micro-gap gas discharge under AC/DC voltage

In order to study the discharge mechanism of electrodes with different spacing under AC and DC voltage,an experimental platform based on micro-gap precise distance controller was built.The breakdown voltage of stainless steel electrodes at 1～100 μm was measured,and the breakdown voltage curve was drawn and compared with the Paschen curve.It was found that the breakdown voltage curve was not consistent with the Paschen curve at 1～5 μm.With the increase of spacing,the trend of breakdown voltage at 5～100 μm was similar to that of Paschen curve.Through calculation,the breakdown field strength at 1～5μm was 10~8 V/m.According to the measured breakdown voltage curve,the effective electron yield was estimated.The relationship between the reduced electric field E/p and the electric field reciprocal was analyzed.The dependence of the relationship was found that the field emission in the 1～5 μm was mainly determined by the high field strength.Finally,the relationship between different spacing and field emission current