Determination of the Impurity Level of High-Purity Arsine by Chromatography–Mass-Spectrometry

The impurity composition of arsine is studied by gas chromatography – mass-spectrometry. Impu-rities of permanent gases; carbon dioxide; hydrides; saturated, unsaturated, and aromatic hydrocarbons C 1 –C 6 ; halogenated hydrocarbons; sulfur compounds; and arsine and diarsine alkyl derivatives are determined. The impurity level of high-purity arsine is 10 –6 –10 –5 vol %. Impurity concentrations in arsine after synthesis and in the fractions extracted in the course of its rectification are rather high and lie in the range 10 –6 –0.1 vol %. The limits of detection for impurities are 2 × 10 –7 –2 × 10 –4 vol %.