Profile Analysis of Ferrite–Garnet Films by Glow-Discharge Optical Emission Spectroscopy

The results of experiments on the application of the method of glow discharge optical emission spectroscopy for the profile analysis of vacuum-deposited single- and double-layer films of multicomponent ferrite–garnets of various compositions before and after crystallization annealing have been presented. The presence of internal and external transition layers has been revealed and the modification of their elemental composition during crystallization and at different synthesis sequences of individual components in ferrite–garnet heterostructures have been studied.