The Topography of Surface and Light Transmission by Quartz Windows after Exposure in a High-Frequency Discharge in Deuterium and Mixture of Deuterium with Nitrogen

The effect of a high-frequency discharge on the change in the topography of the surface of KU-1 optical quartz and transmission of visible light (400–1000 nm) is studied. The working gases of the discharge are D 2 and a D 2 /N 2 mixture, in which the fraction of N 2 is 25 mol %. The addition of nitr...

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Veröffentlicht in:Technical physics 2021-02, Vol.66 (2), p.288-297
Hauptverfasser: Gorodetsky, A. E., Markin, A. V., Bukhovets, V. L., Zolotarevsky, V. I., Zalavutdinov, R. Kh, Babinov, N. A., Dmitriev, A. M., Razdobarin, A. G., Mukhin, E. E.
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Sprache:eng
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Zusammenfassung:The effect of a high-frequency discharge on the change in the topography of the surface of KU-1 optical quartz and transmission of visible light (400–1000 nm) is studied. The working gases of the discharge are D 2 and a D 2 /N 2 mixture, in which the fraction of N 2 is 25 mol %. The addition of nitrogen increases the rate of sputtering from 60 to 300 nm/h without changing the stoichiometry of the surface layers. After the exposure in plasma, the root-mean-square roughness of the surface decreases from 1.3 to 0.6 nm. The transparence of quartz remains unchanged. The analysis of the roughness and calculation of the diffuse light scattering with a wavelength of 400 nm after passing through quartz are executed using the power spectral density functions.
ISSN:1063-7842
1090-6525
DOI:10.1134/S1063784221020122