Application of the triple Langmuir probe to study local plasma parameters in the radiofrequency discharge that is placed in an additional applied magnetostatic field

This paper considers the application of the triple Langmuir probe method to investigate the local plasma parameters of the radio frequency (RF) discharge that is placed in the applied magnetostatic field. The main criteria applicability for such a method for experimental diagnostics of RF plasma par...

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Veröffentlicht in:Physics of plasmas 2021-03, Vol.28 (3)
Hauptverfasser: Kozhevnikov, Vladimir, Melnikov, Andrey, Khartov, Sergey
Format: Artikel
Sprache:eng
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Zusammenfassung:This paper considers the application of the triple Langmuir probe method to investigate the local plasma parameters of the radio frequency (RF) discharge that is placed in the applied magnetostatic field. The main criteria applicability for such a method for experimental diagnostics of RF plasma parameters is presented. As an example, this paper presents experimental results that were obtained using the proposed method on local plasma parameters in one of the cross sections of the discharge chamber of the RF ion source with an applied magnetostatic field. The influence of the magnetostatic field on the radial distributions of charged particle density and electron temperature is shown.
ISSN:1070-664X
1089-7674
DOI:10.1063/5.0032306