Synthesis of Silicon-Carbide Nanoparticles by the Laser Pyrolysis of a Mixture of Monosilane and Acetylene

Synthesis of Silicon-Carbide Nanoparticles by the Laser Pyrolysis of a Mixture of Monosilane and Acetylene

The conditions of the laser-stimulated synthesis reaction of silicon-carbide nanoparticles are determined and their characterization is performed. The laser synthesis reaction of SiC particles in the gas phase is observed with the SiH 4 /C 2 H 2 flow ratio in the range of 1.6–3.2. The temperature in...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2020-11, Vol.54 (11), p.1467-1471
Hauptverfasser: Ershov, I. A., Iskhakova, L. D., Krasovskii, V. I., Milovich, F. O., Rasmagin, S. I., Pustovoi, V. I.
Format: Artikel
Sprache:eng
Schlagworte:
Acetylene
Chemical synthesis
Composite Semiconductors
Lasers
Magnetic Materials
Magnetism
Microcrystalline
Nanocrystalline
Nanoparticles
Optical properties
Physics
Physics and Astronomy
Porous
Pyrolysis
Silane
Silicon
Silicon carbide
Vapor phases
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Zusammenfassung:The conditions of the laser-stimulated synthesis reaction of silicon-carbide nanoparticles are determined and their characterization is performed. The laser synthesis reaction of SiC particles in the gas phase is observed with the SiH 4 /C 2 H 2 flow ratio in the range of 1.6–3.2. The temperature in the reaction-zone region is ~1400–1500°C. Silicon-carbide nanoparticles ~6 nm in diameter are fabricated and their composition is investigated.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782620110081