Review and Prospect of Micro-nano Vibration Energy Harvesters

Harvesting vibration energy, which is widely distributed in the ambient environment, such as human motions, machine vibration, breeze blowing, water ripple and sound vibration, is of great significance for self-powering of electronics. The working mechanisms and current research progress of micro-nano vibration energy harvesters based on electromagnetic, piezoelectric, triboelectric are elaborated. The characteristics and existing challenges are summarized. The development prospect of the micro-nano vibration energy harvesters is finally expected.