Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses / Thin Film Shape Memory Alloys for Micro Actuators with Three-Dimensional Structures

In this paper, we investigate the characteristics of Ti-Ni-Zr thin film metallic glasses (TFMGs)/ shape memory alloys (SMAs) for microelectromechanical systems (MEMS) applications with three-dimensional structures. The amorphous Ti-Ni-Zr thin films having a Ni content of more than 50 at.% and Zr con...

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Veröffentlicht in:	International journal of automation technology 2015-11, Vol.9 (6), p.662-667
Hauptverfasser:	Sakurai, Junpei, Hata, Seiichi
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous materials Glass transition temperature Metallic glasses Microactuators Microelectromechanical systems Nickel Shape memory alloys Temperature Thermal stability Thin films Titanium Viscosity
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