Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses / Thin Film Shape Memory Alloys for Micro Actuators with Three-Dimensional Structures

In this paper, we investigate the characteristics of Ti-Ni-Zr thin film metallic glasses (TFMGs)/ shape memory alloys (SMAs) for microelectromechanical systems (MEMS) applications with three-dimensional structures. The amorphous Ti-Ni-Zr thin films having a Ni content of more than 50 at.% and Zr content of more than 11 at.% undergo glass transitions and are TFMGs. The Ti 39 Ni 50 Zr 11 TFMG has the lowest glass transition temperature T g of 703 K and a wide supercooled liquid region Δ T of 57 K. Moreover, it has high thermal stability at T g . However, the apparent viscosity of the Ti 39 Ni 50 Zr 11 is higher than those of other Ti-Ni-Zr TFMGs. Moreover, the Ti-Ni-Zr TFMG exhibits higher viscosity than conventional TFMGs because the alloy composition of Ti-Ni-Zr TFMGs/SMAs is far from the eutectic point.