Study on the Synthesis of SiC Powder Material by Using Induction Heating System

By using a NAURA Advanced Physical Vapor Transport (PVT) System, the character ofthe synthesized SiC powder were studied. Mainly from the aspects of purity and particle size, and relevant experiments were designed to understand the influence of the powder source on the synthesized SiC powder. The results showed that the selection of Si powder source with appropriate particle size was conducive to increase the proportion of large particle size of SiC powder. In addition, the purification of material source in the early stage of the process was beneficial to improve the purity of SiC powder. The results showed successful preparation of optimized SiC powder and thus high-quality SiC wafers were made.