Nanoscale stereometric evaluation of BiZn0.5Ti0.5O3 thin films grown by RF magnetron sputtering

•Suitable structure of BiZn0.5Ti0.5O3 thin films was observed for deposition at 600 °C.•Nanoescale morphology exhibited conical nanopeaks, whose higher roughness was computed for 600 °C.•Stereometric parameters indicated a better and more anisotropic film deposited at 600 °C.•Power spectrum density and slices confirmed the influence of temperature on the morphology of the films. Sputtered BiZn0.5Ti0.5O3 thin films were synthesized and analyzed. The structure and morphology of BZT350, BZT600, and BZT700 were studied by XRD, SEM, and AFM. BZT600 and BZT700 exhibited crystalline nature, while BZT350 exhibited amorphous structure. Furthermore, BZT600 and BZT700 displayed grains size of ~ 33 and ~ 328 nm, respectively. Stereometric analysis revealed that the nanoscale morphology of all films had conical nanopeaks, with BZT600 having greater roughness (~9.6 nm). BZT600 presented the highest Sk and Vmp values in addition to greater asymmetry and less flat behavior. Additionally, functional, spatial, and hybrid parameters revealed that BZT600 was more irregular and less isotropic. Power spectrum density (PSD) and slices suggested that the nanotexture of BZT600 has greater potential for capturing energy in solar cells. These materials can be of great interest for the fabrication of new photovoltaic or energy storage devices.