Development of MEMS Tactile Sensation Device for Haptic Robot

A tactile sensation device using micro-electromechanical system (MEMS) has been developed. This device is integrated with a haptic sensation robot for use as fingers. The tactile device must be miniaturized to enable attachment of the actuator mechanism to the fingers. Therefore, we used MEMS technology for this device. The device is composed of an interface part fabricated by 3D printing, pins, and MEMS cantilever-type actuators. It has the ability to stimulate the mechanoreceptors of the fingertips. The device and robot can display not only high-resolution images of the fingertips but also the repulsion force during finger operations such as tool holding and rotation. We have not yet achieved the final device because of fabrication problems. In this paper, we explain the details, progress of development, and results of trials on the prototype device.