Temperature dependence of initial deformation and cracks of indium tin oxide film by quasi-continuous-wave laser irradiations

In this study, we investigated the temperature dependence of the initial deformation and cracks of indium tin oxide (ITO) thin films deposited on a fused silica substrate using a 1064-nm quasi-continuous-wave laser. We observed that the laser-induced morphology threshold of the film shows a dramatic...

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Veröffentlicht in:Optical materials express 2020-10, Vol.10 (10), p.2394
Hauptverfasser: Peng, Liping, Zhao, Yuan’an, Liu, Xiaofeng, Cao, Zhaoliang, Li, Dawei, Lian, Yafei, Ma, Hao, Hong, Ruijin, Tao, Chunxian, Zhang, Dawei, Shao, Jianda
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Sprache:eng
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Zusammenfassung:In this study, we investigated the temperature dependence of the initial deformation and cracks of indium tin oxide (ITO) thin films deposited on a fused silica substrate using a 1064-nm quasi-continuous-wave laser. We observed that the laser-induced morphology threshold of the film shows a dramatic thickness effect. The laser-induced morphology threshold of a 100-nm ITO film is four times that of a 300-nm ITO film. Initial laser-induced surface morphologies of the initial deformation and cracks will occur as long as temperature rises to about 520 K and 1250 K, respectively, irrespective of the thickness of a film. Experimental results indicate that a thin ITO film is more likely to tolerate laser irradiation because of lower absorptivity than a thicker ITO film. Studying the temperature effect helps clarify more about the laser annealing process, which is a promising process in improving the performance of the ITO films.
ISSN:2159-3930
2159-3930
DOI:10.1364/OME.402183