Temperature dependence of initial deformation and cracks of indium tin oxide film by quasi-continuous-wave laser irradiations
In this study, we investigated the temperature dependence of the initial deformation and cracks of indium tin oxide (ITO) thin films deposited on a fused silica substrate using a 1064-nm quasi-continuous-wave laser. We observed that the laser-induced morphology threshold of the film shows a dramatic...
Gespeichert in:
Veröffentlicht in: | Optical materials express 2020-10, Vol.10 (10), p.2394 |
---|---|
Hauptverfasser: | , , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | In this study, we investigated the temperature dependence of the initial deformation and cracks of indium tin oxide (ITO) thin films deposited on a fused silica substrate using a 1064-nm quasi-continuous-wave laser. We observed that the laser-induced morphology threshold of the film shows a dramatic thickness effect. The laser-induced morphology threshold of a 100-nm ITO film is four times that of a 300-nm ITO film. Initial laser-induced surface morphologies of the initial deformation and cracks will occur as long as temperature rises to about 520 K and 1250 K, respectively, irrespective of the thickness of a film. Experimental results indicate that a thin ITO film is more likely to tolerate laser irradiation because of lower absorptivity than a thicker ITO film. Studying the temperature effect helps clarify more about the laser annealing process, which is a promising process in improving the performance of the ITO films. |
---|---|
ISSN: | 2159-3930 2159-3930 |
DOI: | 10.1364/OME.402183 |