Effect of Heat Treatment on the Stability of Nanosized (Co40Fe40B20)34(SiO2)66/ZnO/In2O3 Multilayers
An investigation is performed of the thermal stability and phase transformations of thin-film heterogeneous [(Co 40 Fe 40 B 20 ) 34 (SiO 2 ) 66 /ZnO/In 2 O 3 ] 85 multilayers obtained via ion beam sputtering. The system contains 85 layers, each consisting of a (Co 40 Fe 40 B 20 ) 34 (SiO 2 ) 66 comp...
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| Veröffentlicht in: | Bulletin of the Russian Academy of Sciences. Physics 2020-09, Vol.84 (9), p.1100-1103 |
|---|---|
| Hauptverfasser: | , , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | An investigation is performed of the thermal stability and phase transformations of thin-film heterogeneous [(Co
40
Fe
40
B
20
)
34
(SiO
2
)
66
/ZnO/In
2
O
3
]
85
multilayers obtained via ion beam sputtering. The system contains 85 layers, each consisting of a (Co
40
Fe
40
B
20
)
34
(SiO
2
)
66
composite layer and ZnO and In
2
O
3
semiconductor spacers. The sample structure in the initial state and after heat treatment is studied by means of X-ray diffraction. It is shown that the samples are stable at temperatures of up to 500°С. Zn
2
SiO
4
, InBO
3
, CoFe, and In
2
O
3
phases form during annealing. |
|---|---|
| ISSN: | 1062-8738 1934-9432 |
| DOI: | 10.3103/S1062873820090051 |