Frequency Tunable Surface Acoustic Wave Actuators for Adjustable Pitch Diffraction Grating

Diffraction gratings are commonly used in optical instruments such as in spectrometers, monochromators, and wavelength division multiplexing devices. The diffraction efficiency is directly related to the ratio of the grating spacing or pitch to the wavelength of the light. In a sinusoidal grating (o...

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Veröffentlicht in:Journal of microelectromechanical systems 2020-10, Vol.29 (5), p.699-705
Hauptverfasser: Frez, Clifford F., Coskun, M. Bulut, Scott, Valerie J., Wu, Yen-Hung, Fraeman, Abigail, Rais-Zadeh, Mina
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Sprache:eng
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Zusammenfassung:Diffraction gratings are commonly used in optical instruments such as in spectrometers, monochromators, and wavelength division multiplexing devices. The diffraction efficiency is directly related to the ratio of the grating spacing or pitch to the wavelength of the light. In a sinusoidal grating (or holographic grating) the efficiency is generally lower than a blazed grating with a saw tooth profile, but the spectral coverage can be broader. To address a large spectral range, advanced spectrometers use a number of diffraction gratings with a fixed pitch. In this paper, we show for the first time, the use of a tunable-frequency surface acoustic wave (SAW) delay line as a broad-band sinusoidal diffraction grating. To tune the frequency, we tune the effective spacing of the interdigitated transducers (IDTs) by applying specific phases to each IDT finger. The prototype SAW grating covers frequency range of 86 MHz to 360 MHz corresponding to optical range of 1.3~\mu \text{m} to 9~\mu \text{m} . [2020-0189]
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2020.3000151