Thermoelectric Si1−xGex and Ge epitaxial films on Si(001) with controlled composition and strain for group IV element-based thermoelectric generators
This study presents the material design of Si1−xGex epitaxial films/Si for thin film thermoelectric generators (TFTEGs) by investigating their thermoelectric properties. The thermoelectric films composed of group-IV elements are advantageous due to their compatibility with the Si process. We fabrica...
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Veröffentlicht in: | Applied physics letters 2020-10, Vol.117 (14) |
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Hauptverfasser: | , , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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