P‐13: Large Subthreshold Swing of LTPS TFTs by Efficient Annealing Method for Light Emitting Diode Displays

P‐13: Large Subthreshold Swing of LTPS TFTs by Efficient Annealing Method for Light Emitting Diode Displays

In the OLED backplane process, we have succeeded in controlling the TFT characteristics by optimizing the condition of hydrogenation annealing. This resulted in the good gray level control of the OLED display. We have finally developed the OLED smartphone display using this technology.

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Veröffentlicht in:SID International Symposium Digest of technical papers 2020-08, Vol.51 (1), p.1358-1361
Hauptverfasser: Saito, Takao, Kanzaki, Yosuke, Miwa, Masahiko, Yamanaka, Masaki, Sun, Yi, Kaneko, Seiji, Kataoka, Yoshiharu
Format: Artikel
Sprache:eng
Schlagworte:
activation annealing
Annealing
Backplanes
hydrogenation annealing
Light emitting diodes
poly-Si
subthreshold swing
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Zusammenfassung:In the OLED backplane process, we have succeeded in controlling the TFT characteristics by optimizing the condition of hydrogenation annealing. This resulted in the good gray level control of the OLED display. We have finally developed the OLED smartphone display using this technology.
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.14136