14‐3: Flexible Image Sensor Array Using IGZO TFT Backplane Technology for X‐ray Detector

A flexible X‐ray sensor array using IGZO‐TFT was prototyped. It is known that IGZO‐TFT shows faster read‐out speed compared to amorphous silicon TFT. With such superior characteristics, IGZO‐TFT yield dynamic motion X‐ray detectors with great performance. In addition, flexible substrate realizes lig...

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Veröffentlicht in:	SID International Symposium Digest of technical papers 2020-08, Vol.51 (1), p.184-187
Hauptverfasser:	Takita, Rikiya, Nakamura, Wataru, Kubota, Akinori, Nakano, Fumiki, Tomiyasu, Kazuhide, Nakamura, Yu, Makita, Naoki
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous silicon Backplanes Flexible components Flexible X-ray sensor array IGZO TFT Indium gallium zinc oxide Photo diode Sensor arrays Sensors Substrates Weight reduction
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Zusammenfassung:	A flexible X‐ray sensor array using IGZO‐TFT was prototyped. It is known that IGZO‐TFT shows faster read‐out speed compared to amorphous silicon TFT. With such superior characteristics, IGZO‐TFT yield dynamic motion X‐ray detectors with great performance. In addition, flexible substrate realizes light‐weight and robust detector. In this paper we evaluated the IGZO‐TFT flexible sensor array and it showed good characteristics.
ISSN:	0097-966X 2168-0159
DOI:	10.1002/sdtp.13833