P‐48: Study of ITO Electrode on the White Color Uniformity of TFT‐LCD

P‐48: Study of ITO Electrode on the White Color Uniformity of TFT‐LCD

This paper makes a research on the relationship between TFT transmittance and white color uniformity, which based on 1st ITO process optimization. The results show that the better TFT transmittance uniformity leads to better white color uniformity, and the ITO oxidation is an important factor for TF...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2020-08, Vol.51 (1), p.1526-1529
Hauptverfasser: An, Hui, Cao, Binbin, Lv, Yanming, Ye, Chengzhi, Li, Fangfang, Ma, Li, Duanmu, Qingyong, Yang, Zengqian, Peng, Junlin, Liu, Zengli, Li, Fajie, Peng, Hongyong, Lu, Xiangwan, Li, Hengbin
Format: Artikel
Sprache:eng
Schlagworte:
Annealing
Color
ITO
Optimization
Oxidation
Oxidization
Transmittance
White color uniformity
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Beschreibung
Zusammenfassung:This paper makes a research on the relationship between TFT transmittance and white color uniformity, which based on 1st ITO process optimization. The results show that the better TFT transmittance uniformity leads to better white color uniformity, and the ITO oxidation is an important factor for TFT transmittance uniformity improvement. Annealing and increase oxygen flow during ITO sputtering when annealing is skipped are both the effective methods to obtain an excellent white color uniformity.
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.14179