A Compact Temperature Sensor With a Resolution FoM of 1.82 pJ·K2

In this article, a compact ultralow-power smart temperature sensor realized in 130-nm standard CMOS technology, provided by STMicroelectronics, is presented. The sensor is designed with the aim of measuring local temperature variations in the range of −20 °C-85 °C in temperature drift compensation applications. It relies on a simple circuit topology that employs two current-controlled oscillators-a divider and a 15-bit counter-which allows temperature-to-digital conversion. Experimental results show an inaccuracy of ±0.6 °C ( 3\sigma ) and a resolution of 0.012 °C with power consumption as low as 6~\mu \text{W} at 1.3-V power supply with a total die area of only 0.00916 mm 2 .