Self‐Assemby: Wafer‐Scale High‐Quality Microtubular Devices Fabricated via Dry‐Etching for Optical and Microelectronic Applications (Adv. Mater. 37/2020)

In article number 2003252, Libo Ma, Oliver G. Schmidt, and co‐workers develop a dry‐release approach for the rolling up of strained nanomembranes, for the fabrication of electronic and optical devices. This approach results in in high yield, reproducibility, and uniformity, and represents a major st...

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Veröffentlicht in:Advanced materials (Weinheim) 2020-09, Vol.32 (37), p.n/a
Hauptverfasser: Saggau, Christian N., Gabler, Felix, Karnaushenko, Dmitriy D., Karnaushenko, Daniil, Ma, Libo, Schmidt, Oliver G.
Format: Artikel
Sprache:eng
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Zusammenfassung:In article number 2003252, Libo Ma, Oliver G. Schmidt, and co‐workers develop a dry‐release approach for the rolling up of strained nanomembranes, for the fabrication of electronic and optical devices. This approach results in in high yield, reproducibility, and uniformity, and represents a major step toward wafer‐scale integration of microdevices.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.202070281