Self‐Assemby: Wafer‐Scale High‐Quality Microtubular Devices Fabricated via Dry‐Etching for Optical and Microelectronic Applications (Adv. Mater. 37/2020)
In article number 2003252, Libo Ma, Oliver G. Schmidt, and co‐workers develop a dry‐release approach for the rolling up of strained nanomembranes, for the fabrication of electronic and optical devices. This approach results in in high yield, reproducibility, and uniformity, and represents a major st...
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Veröffentlicht in: | Advanced materials (Weinheim) 2020-09, Vol.32 (37), p.n/a |
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Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | In article number 2003252, Libo Ma, Oliver G. Schmidt, and co‐workers develop a dry‐release approach for the rolling up of strained nanomembranes, for the fabrication of electronic and optical devices. This approach results in in high yield, reproducibility, and uniformity, and represents a major step toward wafer‐scale integration of microdevices. |
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ISSN: | 0935-9648 1521-4095 |
DOI: | 10.1002/adma.202070281 |