A ring-shaped linear ultrasonic motor based on PSN-PMS-PZT ceramic

[Display omitted] •For the first time, a novel ring-shaped linear ultrasonic motor operating in either E01,a or E01,b mode (orthogonal mode) was proposed.•The motor was fabricated by using a self-made high-performance PSN-PMS-PZT ceramic with the optimal composition.•It exhibits a fast moving speed...

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Veröffentlicht in:Sensors and actuators. A. Physical. 2020-07, Vol.309, p.112036, Article 112036
Hauptverfasser: Xin, Xudong, Yu, Yang, Wu, Jingen, Gao, Xiangyu, Li, Zhanmiao, Yi, Xingyu, Chen, Wanping, Dong, Shuxiang
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Sprache:eng
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Zusammenfassung:[Display omitted] •For the first time, a novel ring-shaped linear ultrasonic motor operating in either E01,a or E01,b mode (orthogonal mode) was proposed.•The motor was fabricated by using a self-made high-performance PSN-PMS-PZT ceramic with the optimal composition.•It exhibits a fast moving speed of 248 mm/s, a relatively large driving force of 2.6 N, and a high positioning precision of 0.2 μm in open-loop control. In this work, we propose a novel ring-shaped linear ultrasonic motor operating in either E01,a or E01,b mode (orthogonal mode). The motor is fabricated using a self-made high-performance PSN-PMS-PZT ceramic with the optimal composition, which has a high vibration velocity of 0.86 m/s (rms value) at resonance. The vibration velocity is about twice that of a commercialized hard Pb(Zr,Ti)O3 ceramic. Experimental results show that our proposed motor performs much better linear motion symmetricity in two directions comparing to previously reported linear ultrasonic motors. It exhibits a fast moving speed of 248 mm/s, a relatively large driving force of 2.6 N, and a high positioning precision of 0.2 μm in open-loop control, indicating that the proposed linear motor based on self-made PSN-PMS-PZT ceramic has great potential applications for precise actuations.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2020.112036