Commercialization of Highly Rugged 4H-SiC 3300 V Schottky Diodes and Power MOSFETs

In this paper, we present a new family of 3300 V silicon carbide (SiC) Schottky barrier diodes (SBDs) and power MOSFETs. The main design requirements are discussed with an emphasis on the design rules to improve the long-term reliability. Basic static and dynamic performance demonstrates low conduction and switching losses. Long-term tests such as high-temperature reverse bias (HTRB) and body diode forward bias stress were performed to evaluate the devices’ reliability. An emission microscopy (EMMI) study was conducted to assess the quality of the gate oxide. Outstanding surge and avalanche capabilities are reported with UIS ruggedness of 11.4 and 20.8 J.cm-2 for SBDs and MOSFETs, respectively.