Design and Analysis of a Flexure-Based Parallel XY Stage Driven by Differential Piezo Forces

The non-bipolar operation of a stack-type piezo actuator causes non-bidirectional motion of the piezo-driven stage. This paper proposes a piezo-driven XY stage with a monolithic compliant parallel mechanism for fully bidirectional operation. Four prismatic-prismatic flexure-based joint chains are ar...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:International journal of precision engineering and manufacturing 2020-08, Vol.21 (8), p.1547-1561
Hauptverfasser: Choi, Kee-Bong, Lee, Jaejong, Kim, Geehong, Lim, Hyungjun, Kwon, Soongeun, Lee, Sang-Chul
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The non-bipolar operation of a stack-type piezo actuator causes non-bidirectional motion of the piezo-driven stage. This paper proposes a piezo-driven XY stage with a monolithic compliant parallel mechanism for fully bidirectional operation. Four prismatic-prismatic flexure-based joint chains are arranged antagonistically at the four sides of a target platform of the XY stage. The motion of each axis is conducted by differential force between piezo actuators in two actuating mechanisms arranged at both sides of a target platform along the same axis. Due to this antagonistic arrangement, the home position of the target platform is at the center position of the full operating range, and the target platform is movable along the positive and negative directions from the home position. Mathematical modeling of the proposed compliant mechanism is performed using a matrix-based equation of motion. The compliant mechanism is designed to satisfy design constraints using the mathematical model, and the designed mechanism is then analyzed using the Finite Element Method (FEM). The proposed bidirectional operation of the piezo-driven XY stage is demonstrated and the performance of the stage is subsequently described in terms of the response time, bandwidth and resolution.
ISSN:2234-7593
2005-4602
DOI:10.1007/s12541-020-00358-0