Electron Beam Deposition of Lanthanum Hexaboride Films for Usage as Anti-Reflective Coating
The development of effective anti-reflective coatings of electromagnetic radiation is a necessary basis to solve a wide range of fundamental and applied problems. We studied the conditions for the preparation of lanthanum hexaboride (LaB 6 ) films by electron beam deposition on Al 2 O 3 , AlN, ZrO 2...
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Veröffentlicht in: | Journal of contemporary physics 2020-04, Vol.55 (2), p.164-170 |
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container_title | Journal of contemporary physics |
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creator | Kuzanyan, A. A. Kuzanyan, A. S. Petrosyan, S. I. Kuzanyan, V. S. Badalyan, G. R. |
description | The development of effective anti-reflective coatings of electromagnetic radiation is a necessary basis to solve a wide range of fundamental and applied problems. We studied the conditions for the preparation of lanthanum hexaboride (LaB
6
) films by electron beam deposition on Al
2
O
3
, AlN, ZrO
2
, Si, and W substrates, and CeB
6
and W coatings. The phase and elemental composition, the microstructure and optical characteristics of samples obtained under various deposition conditions were studied. The relationship between the reflection spectra and the surface roughness of the samples was investigated. The region of the electromagnetic spectrum in which the obtained films can be used as anti-reflection coatings is determined. |
doi_str_mv | 10.3103/S1068337220020073 |
format | Article |
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6
) films by electron beam deposition on Al
2
O
3
, AlN, ZrO
2
, Si, and W substrates, and CeB
6
and W coatings. The phase and elemental composition, the microstructure and optical characteristics of samples obtained under various deposition conditions were studied. The relationship between the reflection spectra and the surface roughness of the samples was investigated. The region of the electromagnetic spectrum in which the obtained films can be used as anti-reflection coatings is determined.</description><identifier>ISSN: 1068-3372</identifier><identifier>EISSN: 1934-9378</identifier><identifier>DOI: 10.3103/S1068337220020073</identifier><language>eng</language><publisher>Moscow: Pleiades Publishing</publisher><subject>Aluminum oxide ; Antireflection coatings ; Deposition ; Electromagnetic radiation ; Electron beams ; Lanthanum ; Optical properties ; Particle and Nuclear Physics ; Physics ; Physics and Astronomy ; Silicon substrates ; Surface roughness ; Zirconium dioxide</subject><ispartof>Journal of contemporary physics, 2020-04, Vol.55 (2), p.164-170</ispartof><rights>Allerton Press, Inc. 2020</rights><rights>Allerton Press, Inc. 2020.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c316t-cbfbc46d04640db47a00970f0d095ebf6e19bfafd6fe1c4d1025cce70567c8323</citedby><cites>FETCH-LOGICAL-c316t-cbfbc46d04640db47a00970f0d095ebf6e19bfafd6fe1c4d1025cce70567c8323</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.3103/S1068337220020073$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.3103/S1068337220020073$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,41488,42557,51319</link.rule.ids></links><search><creatorcontrib>Kuzanyan, A. A.</creatorcontrib><creatorcontrib>Kuzanyan, A. S.</creatorcontrib><creatorcontrib>Petrosyan, S. I.</creatorcontrib><creatorcontrib>Kuzanyan, V. S.</creatorcontrib><creatorcontrib>Badalyan, G. R.</creatorcontrib><title>Electron Beam Deposition of Lanthanum Hexaboride Films for Usage as Anti-Reflective Coating</title><title>Journal of contemporary physics</title><addtitle>J. Contemp. Phys</addtitle><description>The development of effective anti-reflective coatings of electromagnetic radiation is a necessary basis to solve a wide range of fundamental and applied problems. We studied the conditions for the preparation of lanthanum hexaboride (LaB
6
) films by electron beam deposition on Al
2
O
3
, AlN, ZrO
2
, Si, and W substrates, and CeB
6
and W coatings. The phase and elemental composition, the microstructure and optical characteristics of samples obtained under various deposition conditions were studied. The relationship between the reflection spectra and the surface roughness of the samples was investigated. The region of the electromagnetic spectrum in which the obtained films can be used as anti-reflection coatings is determined.</description><subject>Aluminum oxide</subject><subject>Antireflection coatings</subject><subject>Deposition</subject><subject>Electromagnetic radiation</subject><subject>Electron beams</subject><subject>Lanthanum</subject><subject>Optical properties</subject><subject>Particle and Nuclear Physics</subject><subject>Physics</subject><subject>Physics and Astronomy</subject><subject>Silicon substrates</subject><subject>Surface roughness</subject><subject>Zirconium dioxide</subject><issn>1068-3372</issn><issn>1934-9378</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><recordid>eNp1UE1LAzEQDaJgrf4AbwHPq5NkN9s91tpaoSCoPXlYstlJTeluapKK_ntTKngQYWBmeF_wCLlkcC0YiJtnBnIkRMk5QJpSHJEBq0SeVaIcHac7wdkePyVnIawBiiKhA_I63aCO3vX0FlVH73Drgo02_c7Qherjm-p3HZ3jp2qcty3Smd10gRrn6TKoFVIV6LiPNntCs7eyH0gnTkXbr87JiVGbgBc_e0iWs-nLZJ4tHu8fJuNFpgWTMdONaXQuW8hlDm2TlwqgKsFAC1WBjZHIqsYo00qDTOctA15ojSUUstQjwcWQXB18t9697zDEeu12vk-RNc95IbmQokgsdmBp70LwaOqtt53yXzWDet9h_afDpOEHTUjcfoX-1_l_0TcWz3Lj</recordid><startdate>20200401</startdate><enddate>20200401</enddate><creator>Kuzanyan, A. A.</creator><creator>Kuzanyan, A. S.</creator><creator>Petrosyan, S. I.</creator><creator>Kuzanyan, V. S.</creator><creator>Badalyan, G. R.</creator><general>Pleiades Publishing</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20200401</creationdate><title>Electron Beam Deposition of Lanthanum Hexaboride Films for Usage as Anti-Reflective Coating</title><author>Kuzanyan, A. A. ; Kuzanyan, A. S. ; Petrosyan, S. I. ; Kuzanyan, V. S. ; Badalyan, G. R.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c316t-cbfbc46d04640db47a00970f0d095ebf6e19bfafd6fe1c4d1025cce70567c8323</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><topic>Aluminum oxide</topic><topic>Antireflection coatings</topic><topic>Deposition</topic><topic>Electromagnetic radiation</topic><topic>Electron beams</topic><topic>Lanthanum</topic><topic>Optical properties</topic><topic>Particle and Nuclear Physics</topic><topic>Physics</topic><topic>Physics and Astronomy</topic><topic>Silicon substrates</topic><topic>Surface roughness</topic><topic>Zirconium dioxide</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kuzanyan, A. A.</creatorcontrib><creatorcontrib>Kuzanyan, A. S.</creatorcontrib><creatorcontrib>Petrosyan, S. I.</creatorcontrib><creatorcontrib>Kuzanyan, V. S.</creatorcontrib><creatorcontrib>Badalyan, G. R.</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of contemporary physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kuzanyan, A. A.</au><au>Kuzanyan, A. S.</au><au>Petrosyan, S. I.</au><au>Kuzanyan, V. S.</au><au>Badalyan, G. R.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Electron Beam Deposition of Lanthanum Hexaboride Films for Usage as Anti-Reflective Coating</atitle><jtitle>Journal of contemporary physics</jtitle><stitle>J. Contemp. Phys</stitle><date>2020-04-01</date><risdate>2020</risdate><volume>55</volume><issue>2</issue><spage>164</spage><epage>170</epage><pages>164-170</pages><issn>1068-3372</issn><eissn>1934-9378</eissn><abstract>The development of effective anti-reflective coatings of electromagnetic radiation is a necessary basis to solve a wide range of fundamental and applied problems. We studied the conditions for the preparation of lanthanum hexaboride (LaB
6
) films by electron beam deposition on Al
2
O
3
, AlN, ZrO
2
, Si, and W substrates, and CeB
6
and W coatings. The phase and elemental composition, the microstructure and optical characteristics of samples obtained under various deposition conditions were studied. The relationship between the reflection spectra and the surface roughness of the samples was investigated. The region of the electromagnetic spectrum in which the obtained films can be used as anti-reflection coatings is determined.</abstract><cop>Moscow</cop><pub>Pleiades Publishing</pub><doi>10.3103/S1068337220020073</doi><tpages>7</tpages></addata></record> |
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source | SpringerNature Journals |
subjects | Aluminum oxide Antireflection coatings Deposition Electromagnetic radiation Electron beams Lanthanum Optical properties Particle and Nuclear Physics Physics Physics and Astronomy Silicon substrates Surface roughness Zirconium dioxide |
title | Electron Beam Deposition of Lanthanum Hexaboride Films for Usage as Anti-Reflective Coating |
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