Electron Beam Deposition of Lanthanum Hexaboride Films for Usage as Anti-Reflective Coating

The development of effective anti-reflective coatings of electromagnetic radiation is a necessary basis to solve a wide range of fundamental and applied problems. We studied the conditions for the preparation of lanthanum hexaboride (LaB 6 ) films by electron beam deposition on Al 2 O 3 , AlN, ZrO 2 , Si, and W substrates, and CeB 6 and W coatings. The phase and elemental composition, the microstructure and optical characteristics of samples obtained under various deposition conditions were studied. The relationship between the reflection spectra and the surface roughness of the samples was investigated. The region of the electromagnetic spectrum in which the obtained films can be used as anti-reflection coatings is determined.