Numerical Study of the Thresholds of Sputtering of Metals during Bombardment with Low-Energy Ions

Numerical Study of the Thresholds of Sputtering of Metals during Bombardment with Low-Energy Ions

The transfer of energy from bombarding and ions ( = 10–100 eV) to vanadium atoms is studied via molecular dynamics using the V s potential. The threshold energy of vanadium sputtering is determined, and a numerical way of determining the thresholds of sputtering for solids is proposed.

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Veröffentlicht in:Bulletin of the Russian Academy of Sciences. Physics 2020-06, Vol.84 (6), p.720-726
Hauptverfasser: Evstifeev, V. V., Kostina, N. V.
Format: Artikel
Sprache:eng
Schlagworte:
Hadrons
Heavy Ions
Ion bombardment
Molecular dynamics
Nuclear Physics
Physics
Physics and Astronomy
Sputtering
Thresholds
Vanadium
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Zusammenfassung:The transfer of energy from bombarding and ions ( = 10–100 eV) to vanadium atoms is studied via molecular dynamics using the V s potential. The threshold energy of vanadium sputtering is determined, and a numerical way of determining the thresholds of sputtering for solids is proposed.
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873820060118