Effects of Redundant Electrode Width on Stability of a-InGaZnO Thin-Film Transistors Under Hot-Carrier Stress

In this article, the effects of redundant electrode width on stability of inverted staggered via-contact structured amorphous indium gallium zinc oxide thin-film transistors (a-IGZO TFTs) under hot-carrier stress (HCS) were investigated. It is found that devices with a larger redundant electrode wid...

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Veröffentlicht in:IEEE transactions on electron devices 2020-06, Vol.67 (6), p.2372-2375
Hauptverfasser: Lin, Dong, Su, Wan-Ching, Chang, Ting-Chang, Chen, Hong-Chih, Tu, Yu-Fa, Yang, Jianwen, Zhou, Kuan-Ju, Hung, Yang-Hao, Lu, I-Nien, Tsai, Tsung-Ming, Zhang, Qun
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Sprache:eng
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Zusammenfassung:In this article, the effects of redundant electrode width on stability of inverted staggered via-contact structured amorphous indium gallium zinc oxide thin-film transistors (a-IGZO TFTs) under hot-carrier stress (HCS) were investigated. It is found that devices with a larger redundant electrode width have a severer degradation behavior after HCS. Capacitance-voltage measurements were conducted to study the degradation mechanism and technology computer-aided design (TCAD) simulation was employed to understand the different degradation behaviors.
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2020.2990135