Effects of Sputtering Time on Structure and Mechanical Properties of (AlCrNbSiTiV)N Coatings Deposited by High-Power Impulse Magnetron Cosputtering

The effect of the sputtering time on the microstructure and mechanical properties of (AlCrNbSiTiV)N coatings deposited using high-power impulse magnetron sputtering (HiPIMS) and cosputtering with (AlCrNbSiTiV) equimolar and Ti targets has been studied. The surface morphology of the (AlCrNbSiTiV)N co...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:JOM (1989) 2020-06, Vol.72 (6), p.2164-2173
Hauptverfasser: Li, Xiuyan, Tang, Weimin, Chen, Cihai, Xu, Chunyao
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 2173
container_issue 6
container_start_page 2164
container_title JOM (1989)
container_volume 72
creator Li, Xiuyan
Tang, Weimin
Chen, Cihai
Xu, Chunyao
description The effect of the sputtering time on the microstructure and mechanical properties of (AlCrNbSiTiV)N coatings deposited using high-power impulse magnetron sputtering (HiPIMS) and cosputtering with (AlCrNbSiTiV) equimolar and Ti targets has been studied. The surface morphology of the (AlCrNbSiTiV)N coatings was uniform and dense, with no peel-off or microcracks, and the films demonstrated complete attachment to the substrate. The (AlCrNbSiTiV)N films had a single face-centered cubic phase. An increase in the sputtering time resulted in the deposition of larger grains on the surface of the film. The greatest (N 2 ) and lowest (Al) concentration varied slightly for the (AlCrNbSiTiV)N films. The elements in the (AlCrNbSiTiV)N film exhibited homogeneous distributions throughout the depth, as measured by secondary-ion mass spectroscopy. The experimental results also revealed that a cutting tool coated with the film using a sputtering time of 30 min exhibited the minimum flank wear (11.7  μ m) and surface roughness ( R a  = 1.018  μ m). Cutting tools coated with (AlCrNbSiTiV)N film for turning Ti-6Al-4V alloys will achieve better cutting quality and have a longer tool life.
doi_str_mv 10.1007/s11837-020-04044-4
format Article
fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_2405915351</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2405915351</sourcerecordid><originalsourceid>FETCH-LOGICAL-c319t-ede9cc13755323f96f320eec3190759c468a9420d1c5027da3f84353f139bec83</originalsourceid><addsrcrecordid>eNp9kM1OwzAQhCMEEuXnBThZ4gIHgx3bTXJE4adIUJBauFqus25dtXGwHSGegxfGpQhunHalnW9GO1l2QskFJaS4DJSWrMAkJ5hwwjnmO9mACs4wLQXdTTvhBeYlK_ezgxCWJEG8ooPs88YY0DEgZ9Ck62MEb9s5mto1INeiSfS9jr0HpNoGPYJeqNZqtULP3nXgo4Vv8uxqVfvxbGKn9vV8jGqnYnIJ6Bo6F2yEBs0-0MjOF_jZvYNH9-uuXwVAj2reQvQpqHbhN_0o2zMqnY9_5mH2cnszrUf44enuvr56wJrRKmJooNKaskIIljNTDQ3LCcDmSApRaT4sVcVz0lAtSF40ipmSM8EMZdUMdMkOs9Otb-fdWw8hyqXrfZsiZc6JqKhggiZVvlVp70LwYGTn7Vr5D0mJ3JQvt-XLVL78Ll_yBLEtFLrNR-D_rP-hvgANlohR</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2405915351</pqid></control><display><type>article</type><title>Effects of Sputtering Time on Structure and Mechanical Properties of (AlCrNbSiTiV)N Coatings Deposited by High-Power Impulse Magnetron Cosputtering</title><source>SpringerLink Journals - AutoHoldings</source><creator>Li, Xiuyan ; Tang, Weimin ; Chen, Cihai ; Xu, Chunyao</creator><creatorcontrib>Li, Xiuyan ; Tang, Weimin ; Chen, Cihai ; Xu, Chunyao</creatorcontrib><description>The effect of the sputtering time on the microstructure and mechanical properties of (AlCrNbSiTiV)N coatings deposited using high-power impulse magnetron sputtering (HiPIMS) and cosputtering with (AlCrNbSiTiV) equimolar and Ti targets has been studied. The surface morphology of the (AlCrNbSiTiV)N coatings was uniform and dense, with no peel-off or microcracks, and the films demonstrated complete attachment to the substrate. The (AlCrNbSiTiV)N films had a single face-centered cubic phase. An increase in the sputtering time resulted in the deposition of larger grains on the surface of the film. The greatest (N 2 ) and lowest (Al) concentration varied slightly for the (AlCrNbSiTiV)N films. The elements in the (AlCrNbSiTiV)N film exhibited homogeneous distributions throughout the depth, as measured by secondary-ion mass spectroscopy. The experimental results also revealed that a cutting tool coated with the film using a sputtering time of 30 min exhibited the minimum flank wear (11.7  μ m) and surface roughness ( R a  = 1.018  μ m). Cutting tools coated with (AlCrNbSiTiV)N film for turning Ti-6Al-4V alloys will achieve better cutting quality and have a longer tool life.</description><identifier>ISSN: 1047-4838</identifier><identifier>EISSN: 1543-1851</identifier><identifier>DOI: 10.1007/s11837-020-04044-4</identifier><language>eng</language><publisher>New York: Springer US</publisher><subject>Advanced Characterization of Interfaces and Thin Films ; Carbide cutting tools ; Chemistry/Food Science ; Coatings ; Corrosion ; Cutting tools ; Cutting wear ; Earth Sciences ; Engineering ; Entropy ; Environment ; Friction ; Grain size ; Magnetic properties ; Magnetron sputtering ; Mechanical properties ; Microcracks ; Morphology ; Nitrogen ; Oxidation ; Physics ; Stainless steel ; Substrates ; Surface roughness ; Thin films ; Titanium base alloys ; Tool life ; Tool wear ; Turning (machining)</subject><ispartof>JOM (1989), 2020-06, Vol.72 (6), p.2164-2173</ispartof><rights>The Minerals, Metals &amp; Materials Society 2020</rights><rights>Copyright Springer Nature B.V. Jun 2020</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c319t-ede9cc13755323f96f320eec3190759c468a9420d1c5027da3f84353f139bec83</citedby><cites>FETCH-LOGICAL-c319t-ede9cc13755323f96f320eec3190759c468a9420d1c5027da3f84353f139bec83</cites><orcidid>0000-0002-6467-6435 ; 0000-0003-4270-3161 ; 0000-0003-1782-1684 ; 0000-0003-1782-7429</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1007/s11837-020-04044-4$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1007/s11837-020-04044-4$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,778,782,27907,27908,41471,42540,51302</link.rule.ids></links><search><creatorcontrib>Li, Xiuyan</creatorcontrib><creatorcontrib>Tang, Weimin</creatorcontrib><creatorcontrib>Chen, Cihai</creatorcontrib><creatorcontrib>Xu, Chunyao</creatorcontrib><title>Effects of Sputtering Time on Structure and Mechanical Properties of (AlCrNbSiTiV)N Coatings Deposited by High-Power Impulse Magnetron Cosputtering</title><title>JOM (1989)</title><addtitle>JOM</addtitle><description>The effect of the sputtering time on the microstructure and mechanical properties of (AlCrNbSiTiV)N coatings deposited using high-power impulse magnetron sputtering (HiPIMS) and cosputtering with (AlCrNbSiTiV) equimolar and Ti targets has been studied. The surface morphology of the (AlCrNbSiTiV)N coatings was uniform and dense, with no peel-off or microcracks, and the films demonstrated complete attachment to the substrate. The (AlCrNbSiTiV)N films had a single face-centered cubic phase. An increase in the sputtering time resulted in the deposition of larger grains on the surface of the film. The greatest (N 2 ) and lowest (Al) concentration varied slightly for the (AlCrNbSiTiV)N films. The elements in the (AlCrNbSiTiV)N film exhibited homogeneous distributions throughout the depth, as measured by secondary-ion mass spectroscopy. The experimental results also revealed that a cutting tool coated with the film using a sputtering time of 30 min exhibited the minimum flank wear (11.7  μ m) and surface roughness ( R a  = 1.018  μ m). Cutting tools coated with (AlCrNbSiTiV)N film for turning Ti-6Al-4V alloys will achieve better cutting quality and have a longer tool life.</description><subject>Advanced Characterization of Interfaces and Thin Films</subject><subject>Carbide cutting tools</subject><subject>Chemistry/Food Science</subject><subject>Coatings</subject><subject>Corrosion</subject><subject>Cutting tools</subject><subject>Cutting wear</subject><subject>Earth Sciences</subject><subject>Engineering</subject><subject>Entropy</subject><subject>Environment</subject><subject>Friction</subject><subject>Grain size</subject><subject>Magnetic properties</subject><subject>Magnetron sputtering</subject><subject>Mechanical properties</subject><subject>Microcracks</subject><subject>Morphology</subject><subject>Nitrogen</subject><subject>Oxidation</subject><subject>Physics</subject><subject>Stainless steel</subject><subject>Substrates</subject><subject>Surface roughness</subject><subject>Thin films</subject><subject>Titanium base alloys</subject><subject>Tool life</subject><subject>Tool wear</subject><subject>Turning (machining)</subject><issn>1047-4838</issn><issn>1543-1851</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><sourceid>ABUWG</sourceid><sourceid>AFKRA</sourceid><sourceid>AZQEC</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><sourceid>GNUQQ</sourceid><recordid>eNp9kM1OwzAQhCMEEuXnBThZ4gIHgx3bTXJE4adIUJBauFqus25dtXGwHSGegxfGpQhunHalnW9GO1l2QskFJaS4DJSWrMAkJ5hwwjnmO9mACs4wLQXdTTvhBeYlK_ezgxCWJEG8ooPs88YY0DEgZ9Ck62MEb9s5mto1INeiSfS9jr0HpNoGPYJeqNZqtULP3nXgo4Vv8uxqVfvxbGKn9vV8jGqnYnIJ6Bo6F2yEBs0-0MjOF_jZvYNH9-uuXwVAj2reQvQpqHbhN_0o2zMqnY9_5mH2cnszrUf44enuvr56wJrRKmJooNKaskIIljNTDQ3LCcDmSApRaT4sVcVz0lAtSF40ipmSM8EMZdUMdMkOs9Otb-fdWw8hyqXrfZsiZc6JqKhggiZVvlVp70LwYGTn7Vr5D0mJ3JQvt-XLVL78Ll_yBLEtFLrNR-D_rP-hvgANlohR</recordid><startdate>20200601</startdate><enddate>20200601</enddate><creator>Li, Xiuyan</creator><creator>Tang, Weimin</creator><creator>Chen, Cihai</creator><creator>Xu, Chunyao</creator><general>Springer US</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>3V.</scope><scope>4T-</scope><scope>4U-</scope><scope>7SR</scope><scope>7TA</scope><scope>7WY</scope><scope>7XB</scope><scope>883</scope><scope>88I</scope><scope>8BQ</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>8FK</scope><scope>8FL</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BEZIV</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>FRNLG</scope><scope>GNUQQ</scope><scope>HCIFZ</scope><scope>JG9</scope><scope>K60</scope><scope>K6~</scope><scope>KB.</scope><scope>L.-</scope><scope>M0F</scope><scope>M2P</scope><scope>PDBOC</scope><scope>PQBIZ</scope><scope>PQBZA</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>Q9U</scope><scope>S0X</scope><orcidid>https://orcid.org/0000-0002-6467-6435</orcidid><orcidid>https://orcid.org/0000-0003-4270-3161</orcidid><orcidid>https://orcid.org/0000-0003-1782-1684</orcidid><orcidid>https://orcid.org/0000-0003-1782-7429</orcidid></search><sort><creationdate>20200601</creationdate><title>Effects of Sputtering Time on Structure and Mechanical Properties of (AlCrNbSiTiV)N Coatings Deposited by High-Power Impulse Magnetron Cosputtering</title><author>Li, Xiuyan ; Tang, Weimin ; Chen, Cihai ; Xu, Chunyao</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c319t-ede9cc13755323f96f320eec3190759c468a9420d1c5027da3f84353f139bec83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><topic>Advanced Characterization of Interfaces and Thin Films</topic><topic>Carbide cutting tools</topic><topic>Chemistry/Food Science</topic><topic>Coatings</topic><topic>Corrosion</topic><topic>Cutting tools</topic><topic>Cutting wear</topic><topic>Earth Sciences</topic><topic>Engineering</topic><topic>Entropy</topic><topic>Environment</topic><topic>Friction</topic><topic>Grain size</topic><topic>Magnetic properties</topic><topic>Magnetron sputtering</topic><topic>Mechanical properties</topic><topic>Microcracks</topic><topic>Morphology</topic><topic>Nitrogen</topic><topic>Oxidation</topic><topic>Physics</topic><topic>Stainless steel</topic><topic>Substrates</topic><topic>Surface roughness</topic><topic>Thin films</topic><topic>Titanium base alloys</topic><topic>Tool life</topic><topic>Tool wear</topic><topic>Turning (machining)</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Li, Xiuyan</creatorcontrib><creatorcontrib>Tang, Weimin</creatorcontrib><creatorcontrib>Chen, Cihai</creatorcontrib><creatorcontrib>Xu, Chunyao</creatorcontrib><collection>CrossRef</collection><collection>ProQuest Central (Corporate)</collection><collection>Docstoc</collection><collection>University Readers</collection><collection>Engineered Materials Abstracts</collection><collection>Materials Business File</collection><collection>ABI/INFORM Collection</collection><collection>ProQuest Central (purchase pre-March 2016)</collection><collection>ABI/INFORM Trade &amp; Industry (Alumni Edition)</collection><collection>Science Database (Alumni Edition)</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>ProQuest Central (Alumni) (purchase pre-March 2016)</collection><collection>ABI/INFORM Collection (Alumni Edition)</collection><collection>Materials Science &amp; Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Business Premium Collection</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>Business Premium Collection (Alumni)</collection><collection>ProQuest Central Student</collection><collection>SciTech Premium Collection</collection><collection>Materials Research Database</collection><collection>ProQuest Business Collection (Alumni Edition)</collection><collection>ProQuest Business Collection</collection><collection>Materials Science Database</collection><collection>ABI/INFORM Professional Advanced</collection><collection>ABI/INFORM Trade &amp; Industry</collection><collection>Science Database</collection><collection>Materials Science Collection</collection><collection>ProQuest One Business</collection><collection>ProQuest One Business (Alumni)</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central Basic</collection><collection>SIRS Editorial</collection><jtitle>JOM (1989)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Li, Xiuyan</au><au>Tang, Weimin</au><au>Chen, Cihai</au><au>Xu, Chunyao</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effects of Sputtering Time on Structure and Mechanical Properties of (AlCrNbSiTiV)N Coatings Deposited by High-Power Impulse Magnetron Cosputtering</atitle><jtitle>JOM (1989)</jtitle><stitle>JOM</stitle><date>2020-06-01</date><risdate>2020</risdate><volume>72</volume><issue>6</issue><spage>2164</spage><epage>2173</epage><pages>2164-2173</pages><issn>1047-4838</issn><eissn>1543-1851</eissn><abstract>The effect of the sputtering time on the microstructure and mechanical properties of (AlCrNbSiTiV)N coatings deposited using high-power impulse magnetron sputtering (HiPIMS) and cosputtering with (AlCrNbSiTiV) equimolar and Ti targets has been studied. The surface morphology of the (AlCrNbSiTiV)N coatings was uniform and dense, with no peel-off or microcracks, and the films demonstrated complete attachment to the substrate. The (AlCrNbSiTiV)N films had a single face-centered cubic phase. An increase in the sputtering time resulted in the deposition of larger grains on the surface of the film. The greatest (N 2 ) and lowest (Al) concentration varied slightly for the (AlCrNbSiTiV)N films. The elements in the (AlCrNbSiTiV)N film exhibited homogeneous distributions throughout the depth, as measured by secondary-ion mass spectroscopy. The experimental results also revealed that a cutting tool coated with the film using a sputtering time of 30 min exhibited the minimum flank wear (11.7  μ m) and surface roughness ( R a  = 1.018  μ m). Cutting tools coated with (AlCrNbSiTiV)N film for turning Ti-6Al-4V alloys will achieve better cutting quality and have a longer tool life.</abstract><cop>New York</cop><pub>Springer US</pub><doi>10.1007/s11837-020-04044-4</doi><tpages>10</tpages><orcidid>https://orcid.org/0000-0002-6467-6435</orcidid><orcidid>https://orcid.org/0000-0003-4270-3161</orcidid><orcidid>https://orcid.org/0000-0003-1782-1684</orcidid><orcidid>https://orcid.org/0000-0003-1782-7429</orcidid></addata></record>
fulltext fulltext
identifier ISSN: 1047-4838
ispartof JOM (1989), 2020-06, Vol.72 (6), p.2164-2173
issn 1047-4838
1543-1851
language eng
recordid cdi_proquest_journals_2405915351
source SpringerLink Journals - AutoHoldings
subjects Advanced Characterization of Interfaces and Thin Films
Carbide cutting tools
Chemistry/Food Science
Coatings
Corrosion
Cutting tools
Cutting wear
Earth Sciences
Engineering
Entropy
Environment
Friction
Grain size
Magnetic properties
Magnetron sputtering
Mechanical properties
Microcracks
Morphology
Nitrogen
Oxidation
Physics
Stainless steel
Substrates
Surface roughness
Thin films
Titanium base alloys
Tool life
Tool wear
Turning (machining)
title Effects of Sputtering Time on Structure and Mechanical Properties of (AlCrNbSiTiV)N Coatings Deposited by High-Power Impulse Magnetron Cosputtering
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-16T23%3A24%3A37IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Effects%20of%20Sputtering%20Time%20on%20Structure%20and%20Mechanical%20Properties%20of%20(AlCrNbSiTiV)N%20Coatings%20Deposited%20by%20High-Power%20Impulse%20Magnetron%20Cosputtering&rft.jtitle=JOM%20(1989)&rft.au=Li,%20Xiuyan&rft.date=2020-06-01&rft.volume=72&rft.issue=6&rft.spage=2164&rft.epage=2173&rft.pages=2164-2173&rft.issn=1047-4838&rft.eissn=1543-1851&rft_id=info:doi/10.1007/s11837-020-04044-4&rft_dat=%3Cproquest_cross%3E2405915351%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2405915351&rft_id=info:pmid/&rfr_iscdi=true