Thermal Conductivity Measurement of Soda–Lime–Silica Glass by Transient 3ω Method with Au Thin Film-Based Micro-heater/Temperature Sensor Fabricated by an Innovative Approach

Present work reports thermal conductivity measurement in a commercial soda–lime–silica glass substrate by the transient 3 ω method using a unique, custom-built in-house setup. Most importantly, a micro-heater (MH) cum temperature sensor is fabricated for this purpose. At first the MH-patterned mask is developed by CO 2 laser cutting technique on quartz glass. The MH (L-5 mm, W-65–70 μm, t-140 nm) is fabricated by sputtered Au thin film on the commercial soda–lime–silica glass substrate. Following evaluations of the thermo-electrical properties, microstructure and surface morphology of the Au thin film, the TCR of the MH is noted to be 0.001469 K −1 . Finally, the thermal conductivity of the soda–lime–silica glass substrate is measured as 1.46 W·m −1 ·K −1 . The error in measurement calculated by the Kline–McClintock method is