Formation of La0.7Sr0.3MnO3 Clusters in Magnetron Plasma under Action of an Ion Acoustic Wave on the Particle Flow

We have studied the kinetics of the cluster formation in magnetron plasma in a moving particle flux obtained by sputtering of La 0.7 Sr 0.3 MnO 3 target with subsequent deposition of clusterized amorphous layers on an extended glass substrate. The influence of an ion-acoustic wave on the spatial mod...

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Veröffentlicht in:	Technical physics letters 2020, Vol.46 (1), p.42-46
Hauptverfasser:	Okunev, V. D., Samoilenko, Z. A., Nikolaenko, Yu. M., D’yachenko, T. A., Korneevets, A. S., Pushenko, E. I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic properties Classical and Continuum Physics Glass substrates Ion acoustic waves Manganese ions Physics Physics and Astronomy
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Zusammenfassung:	We have studied the kinetics of the cluster formation in magnetron plasma in a moving particle flux obtained by sputtering of La 0.7 Sr 0.3 MnO 3 target with subsequent deposition of clusterized amorphous layers on an extended glass substrate. The influence of an ion-acoustic wave on the spatial modulation of a local structure and properties of a clusterized medium at the presence of multivalent manganese ions in plasma is found.
ISSN:	1063-7850 1090-6533
DOI:	10.1134/S1063785020010095