TOF-SIMS Image Data Fusion by Multivariate Analysis and TOF-SIMS Spectrum Analysis by Sparse Modeling and Machine Learning

Time-of-Flight secondary ion mass spectrometry (TOF-SIMS) and scanning electron microscope (SEM) images were fused and then evaluated by means of principal component analysis. As a result, TOF-SIMS spatial resolution could be improved by adding SEM image information to TOF-SIMS data without drastic...

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Veröffentlicht in:	Journal of Surface Analysis 2018, Vol.25(2), pp.103-114
Hauptverfasser:	Ishikura, Wataru, Takahashi, Kazuma, Yamagishi, Takayuki, Aoki, Dan, Fukushima, Kazuhiko, Shiga, Motoki, Aoyagi, Satoka
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	Data integration Ions Machine learning Mass spectrometry Mathematical models Modelling Multivariate analysis Noise prediction Principal components analysis Scanning electron microscopy Scientific imaging Secondary ion mass spectrometry Spatial resolution Spectroscopy Spectrum analysis
Online-Zugang:	Volltext
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