Optical and structural investigations on titanium oxynitride films for visible-UV photocatalytic applications

We report on the epitaxial growth of titanium oxynitride (TiOxNy) films on α-Al2O3 (0001) substrates by using a pulsed-laser deposition technique and their optical properties. Using TiN as a solid source, N content (y) in the films was tuned by changing the partial pressure of O2 gas. The crystallin...

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Veröffentlicht in:Journal of applied physics 2020-04, Vol.127 (13)
Hauptverfasser: Mizushiro, Jun, Yoshimatsu, Kohei, Ohashi, Naoki, Tanaka, Masahiko, Sakata, Osami, Ohtomo, Akira
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Sprache:eng
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Zusammenfassung:We report on the epitaxial growth of titanium oxynitride (TiOxNy) films on α-Al2O3 (0001) substrates by using a pulsed-laser deposition technique and their optical properties. Using TiN as a solid source, N content (y) in the films was tuned by changing the partial pressure of O2 gas. The crystalline phase was found to evolve up to y ≈ 0.4 either from rock-salt type or from rutile-type structures. The optical absorption spectra of the films had two distinct components in regions of 0.44–2.4 eV and 2.4–6 eV, which arise from d–d and charge-transfer transitions, respectively. The former transition decreased with decreasing y and vanished at y ≈ 0.26, where a fundamental absorption edge due to the latter transition was found to be 2.4 eV. The results demonstrate a range of anion compositions in the TiOxNy being suitable for visible-light harvesting applications.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.5143609