Test Objects with a Rectangular Profile for SEM: 2. Certification of the Groove Width

A procedure for certifying the width of relief grooves with a rectangular profile in silicon is described. It is comprised of two operations. The first operation consists in measuring the thickness of a silicon-oxide film on a single-crystal silicon substrate by ellipsometry. The second operation co...

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Bibliographische Detailangaben

Veröffentlicht in:	Surface investigation, x-ray, synchrotron and neutron techniques x-ray, synchrotron and neutron techniques, 2020, Vol.14 (1), p.105-116
1. Verfasser:	Novikov, Yu. A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemistry and Materials Science Ellipsometry Grooves Materials Science Oxide coatings Silicon Silicon oxides Silicon substrates Single crystals Surfaces and Interfaces Thickness measurement Thin Films
Online-Zugang:	Volltext
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