Study of ZrSiB Coatings Obtained by Magnetron Sputtering of ZrB2-20%Si and ZrB2-50%ZrSi2 Cathodes

A comparative study of ZrSiB coatings obtained by magnetron sputtering with the use of cathodes of different phase composition is carried out. The optimal compositions from the point of view of maximum heat resistance are revealed.

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Bibliographische Detailangaben
Veröffentlicht in:	Physics of atomic nuclei 2019-12, Vol.82 (11), p.1437-1440
Hauptverfasser:	Kiryukhantsev-Korneev, F. V., Yatsyuk, I. V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Cathode sputtering Coatings Comparative studies Heat resistance Magnetron sputtering Particle and Nuclear Physics Phase composition Photovoltaic cells Physics Physics and Astronomy Promising Construction Materials Refractory materials Thermal resistance Zirconium compounds
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Beschreibung
Zusammenfassung:	A comparative study of ZrSiB coatings obtained by magnetron sputtering with the use of cathodes of different phase composition is carried out. The optimal compositions from the point of view of maximum heat resistance are revealed.
ISSN:	1063-7788 1562-692X
DOI:	10.1134/S1063778819110073